Iridium Coating Deposited by Double Glow Plasma Technique —...

Iridium Coating Deposited by Double Glow Plasma Technique — Effect of Glow Plasma on Structure of Coating at Single Substrate Edge

Wu, Wangping, Chen, Zhaofeng, Liu, Yong
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Volume:
14
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/14/10/10
Date:
October, 2012
File:
PDF, 288 KB
english, 2012
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