SPIE Proceedings [SPIE SPIE/COS Photonics Asia - Beijing,...

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SPIE Proceedings [SPIE SPIE/COS Photonics Asia - Beijing, China (Thursday 9 October 2014)] Nanophotonics and Micro/Nano Optics II - Fabrication of nano-pillar with sub-100nm resolution based on thiol-ene

Zhou, Zhiping, Wada, Kazumi, Zhang, Man, Deng, Qiling, Shi, Lifang, Pang, Hui, Cao, Axiu, Hu, Song
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Volume:
9277
Year:
2014
Language:
english
DOI:
10.1117/12.2073892
File:
PDF, 451 KB
english, 2014
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