SPIE Proceedings [SPIE SPIE/COS Photonics Asia - Beijing, China (Thursday 9 October 2014)] Nanophotonics and Micro/Nano Optics II - Fabrication of nano-pillar with sub-100nm resolution based on thiol-ene
Zhou, Zhiping, Wada, Kazumi, Zhang, Man, Deng, Qiling, Shi, Lifang, Pang, Hui, Cao, Axiu, Hu, SongVolume:
9277
Year:
2014
Language:
english
DOI:
10.1117/12.2073892
File:
PDF, 451 KB
english, 2014