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Chemical mechanical planarization of amorphous Ge 2 Sb 2 Te 5 with a soft pad
He, Aodong, Liu, Bo, Song, Zhitang, Lü, Yegang, Li, Juntao, Liu, Weili, Feng, Songlin, Wu, GuanpingVolume:
34
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/34/7/076002
Date:
July, 2013
File:
PDF, 104 KB
english, 2013