Simulation of Effective Production of Very High Frequency Hydrogen Plasma Using a Balanced Power Feeding Method
Ogiwara, Kohei, Chen, Weiting, Uchino, Kiichiro, Kawai, YoshinobuVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.11ND01
Date:
November, 2013
File:
PDF, 5.21 MB
english, 2013