New Method to Obtain (001) Surface-Oriented Polycrystalline Silicon Films by Intensity-Modulated Excimer Laser Annealing: Molecular Dynamics Study
Matsubara, Norie, Ogata, Tomohiko, Mitani, Takanori, Munetoh, Shinji, Motooka, TeruakiVolume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.48.03b006
Date:
March, 2009
File:
PDF, 407 KB
english, 2009