Liquid-phase-deposited SiO 2 on...

Semiconductor Science and Technology 2011 / 05 Vol. 26; Iss. 5

Liquid-phase-deposited SiO 2 on AlGaAs and its application

Lee, Kuan-Wei, Huang, Jung-Sheng, Lu, Yu-Lin, Lee, Fang-Ming, Lin, Hsien-Cheng, Huang, Jian-Jun, Wang, Yeong-Her
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Volume:
26
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/26/5/055006
Date:
May, 2011
File:
PDF, 507 KB
english, 2011
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