Neutral ion figuring of chemical vapor deposited SiC

Optical Engineering 1994 / 03 Vol. 33; Iss. 3

Neutral ion figuring of chemical vapor deposited SiC

Drueding, Thomas W.
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Volume:
33
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/12.157687
Date:
March, 1994
File:
PDF, 1.15 MB
english, 1994
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