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Investigation of the inhibiting outdiffusion of erbium atoms to a silicon-on-insulator surface after annealing at high temperature
Qin, Xi-Feng, Li, Hong-Zhen, Li, Shuang, Ji, Zi-Wu, Wang, Hui-Ning, Wang, Feng-Xiang, Fu, GangVolume:
21
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/21/6/066105
Date:
June, 2012
File:
PDF, 679 KB
english, 2012