Galvanic Corrosion Control in Chemical Mechanical Polishing...

Japanese Journal of Applied Physics 2009 / 4 Vol. 48; Iss. 4

Galvanic Corrosion Control in Chemical Mechanical Polishing of Cu Interconnects with Ruthenium Barrier Metal Film

Maruyama, Koji, Shiohara, Morio, Yamada, Kouji, Kondo, Seiichi, Saito, Shuichi
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Volume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.48.04c022
Date:
April, 2009
File:
PDF, 597 KB
english, 2009
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