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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 7 February 2015)] Silicon Photonics X - Monolithic silicon photonics in a sub-100nm SOI CMOS microprocessor foundry: progress from devices to systems

Reed, Graham T., Watts, Michael R., Popović, Miloš A., Wade, Mark T., Orcutt, Jason S., Shainline, Jeffrey M., Sun, Chen, Georgas, Michael, Moss, Benjamin, Kumar, Rajesh, Alloatti, Luca, Pavanello, Fa
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Volume:
9367
Year:
2015
Language:
english
DOI:
10.1117/12.2084604
File:
PDF, 5.29 MB
english, 2015
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