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SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX - Development and testing of a multi-level chevron actuator based positioning system
Rawool, Sandesh, Sivakumar, Ganapathy, Hendriske, Johan, Buscarello, Daniel, Purushothaman, Immanuel, Dallas, Tim E., Kullberg, Richard C., Ramesham, RajeshuniVolume:
7592
Year:
2010
Language:
english
DOI:
10.1117/12.842270
File:
PDF, 1.12 MB
english, 2010