Implementing registration measurements on photomasks at the...

Measurement Science and Technology 2012 / 09 Vol. 23; Iss. 9

Implementing registration measurements on photomasks at the Nanometer Comparator

Köning, Rainer, Weichert, Christoph, Przebierala, Bernd, Flügge, Jens, Haessler-Grohne, Wolfgang, Bosse, Harald
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Volume:
23
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/23/9/094010
Date:
September, 2012
File:
PDF, 173 KB
english, 2012
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