Micromachined three-axis thermal accelerometer with a single composite heater
Bahari, Jamal, Leung, Albert MVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/7/075025
Date:
July, 2011
File:
PDF, 2.05 MB
english, 2011