![](/img/cover-not-exists.png)
Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line
Servin, Isabelle, Tiron, Raluca, Gharbi, Ahmed, Argoud, Maxime, Jullian, Karine, Chamiot-Maitral, Gaëlle, Barros, Patricia Pimenta, Chevalier, Xavier, Belledent, Jérôme, Bossy, Xavier, Moulis, SylvainVolume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.06JC05
Date:
June, 2014
File:
PDF, 3.25 MB
english, 2014