Contact hole shrink by directed self-assembly: Process...

Japanese Journal of Applied Physics 2014 / 06 Vol. 53; Iss. 6S

Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line

Servin, Isabelle, Tiron, Raluca, Gharbi, Ahmed, Argoud, Maxime, Jullian, Karine, Chamiot-Maitral, Gaëlle, Barros, Patricia Pimenta, Chevalier, Xavier, Belledent, Jérôme, Bossy, Xavier, Moulis, Sylvain
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.06JC05
Date:
June, 2014
File:
PDF, 3.25 MB
english, 2014
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