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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining and Microfabrication Process Technology VIII - Plasma etching of polymers like SU8 and BCB
Mischke, Helge, Gruetzner, Gabi, Shaw, Mark, Yasaitis, John A., Perez-Maher, Mary Ann, Karam, Jean MichelVolume:
4979
Year:
2003
Language:
english
DOI:
10.1117/12.472734
File:
PDF, 1.02 MB
english, 2003