A measuring system for mechanical characterization of thin...

A measuring system for mechanical characterization of thin films based on a compact in situ micro-tensile tester and SEM moiré method

Li, Yanjie, Tang, Minjin, Xie, Huimin, Zhu, Ronghua, Luo, Qiang, Gu, Changzhi
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/8/085021
Date:
August, 2013
File:
PDF, 914 KB
english, 2013
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