Error analysis on measuring angle-differential profiles of...

Error analysis on measuring angle-differential profiles of optical reflectivity by dynamic reflectometry

Pen˜a-Gomar, M.
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Volume:
41
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.1489052
Date:
August, 2002
File:
PDF, 85 KB
english, 2002
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