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SPIE Proceedings [SPIE SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 9 July 1995)] Applications of Laser Plasma Radiation II - Investigation of glass polycapillaries for use in proximity x-ray lithography
Klotzko, Ira, Xiao, Qi-Fan, Gibson, David M., Downing, Robert G., Gibson, Walter M., Karnaukhov, Andrei A., Jezewski, Chris J., Richardson, Martin C., Kyrala, George A.Volume:
2523
Year:
1995
Language:
english
DOI:
10.1117/12.220993
File:
PDF, 569 KB
english, 1995