Picosecond laser ablation for silicon micro fuel cell fabrication
Scotti, Gianmario, Trusheim, Daniel, Kanninen, Petri, Naumenko, Denys, Shulz-Ruhtenberg, Malte, Snitka, Valentinas, Kallio, Tanja, Franssila, SamiVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/5/055021
Date:
May, 2013
File:
PDF, 1.62 MB
english, 2013