Rounding and taper fin effect of FinFET varactors observed...

Rounding and taper fin effect of FinFET varactors observed using three-dimensional simulation model

Chen, Chien-Hung, Fang, Ying-Chien, Chiang, Chung-Hao, Chu, Sheng-Yuan
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.078001
Date:
July, 2014
File:
PDF, 514 KB
english, 2014
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