The influence of Exciting Frequency on N 2 and N 2+ Vibrational Temperature of Nitrogen Capacitively Coupled Plasma
Xiao-Jiang, Huang, Yu, Xin, Jie, Zhang, Zhao-Yuan, NingVolume:
26
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/26/5/055202
Date:
May, 2009
File:
PDF, 149 KB
english, 2009