Defect Characteristics in Sulfur-Implanted CVD...

Solid State Phenomena 2001 Vol. 78-79

Defect Characteristics in Sulfur-Implanted CVD Homoepitaxial Diamond

Hasegawa, Mitsuru, Ogura, M., Takeuchi, Daisuke, Yamanaka, Sadanori, Watanabe, Hideyuki, Ri, Shien, Kobayashi, Naoto, Okushi, Hideyo, Sekiguchi, Takashi
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Volume:
78-79
Year:
2001
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.78-79.171
File:
PDF, 438 KB
2001
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