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Low cost fabrication and testing of high isolation radio frequency MEMS switches
Joshi, Abhay B.Volume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.11.3.033001
Date:
August, 2012
File:
PDF, 1.85 MB
english, 2012