Design of a piezoresistive triaxial force sensor probe...

Journal of Micromechanics and Microengineering 2013 / 03 Vol. 23; Iss. 3

Design of a piezoresistive triaxial force sensor probe using the sidewall doping method

Kan, Tetsuo, Takahashi, Hidetoshi, Binh-Khiem, Nguyen, Aoyama, Yuichiro, Takei, Yusuke, Noda, Kentaro, Matsumoto, Kiyoshi, Shimoyama, Isao
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/3/035027
Date:
March, 2013
File:
PDF, 1.33 MB
english, 2013
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