Stable Molecules in N 2 –H 2 Plasmas Measured Using a Quartz Sensor
Suzuki, Atsushi, Asahina, ShuichiVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.11NC04
Date:
November, 2013
File:
PDF, 390 KB
english, 2013