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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Influence of Process Parameters on Leakage Current of Metal-Organic based HfSiOx Dielectrics
Avellan, Alejandro, Patz, Matthias, Erben, Elke, Ivanov, Alexey, Kudelka, StephanVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2355696
File:
PDF, 116 KB
english, 2006