Fabrication of nanopillar forests with high infrared...

Fabrication of nanopillar forests with high infrared absorptance based on rough poly-Si and spacer technology

Mao, Haiyang, Chen, Yuanjing, Ou, Yi, Ou, Wen, Xiong, Jijun, You, Chunjuan, Tan, Qiulin, Chen, Dapeng
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/9/095033
Date:
September, 2013
File:
PDF, 236 KB
english, 2013
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