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Fabrication of densely patterned micro-arrayed multichannel optical filter mosaic
Yi, DingrongVolume:
10
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3639188
Date:
July, 2011
File:
PDF, 1.10 MB
english, 2011