Experiments and results of the silicon micromachined...

Journal of Micro/Nanolithography MEMS and MOEMS 2009 / 04 Vol. 8; Iss. 2

Experiments and results of the silicon micromachined gyroscope

Zhang, Fu-Xue
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Volume:
8
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3122366
Date:
April, 2009
File:
PDF, 433 KB
english, 2009
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