Effect of Tantalum Addition on Optical Transmittance and Electrical Resistivity of TiN Thin Films Prepared by d.c. Magnetron Sputtering
Bourbia, O., Achour, S., Zerkout, S., Benkahoul, M., Harabi, AbdelhamidVolume:
206-213
Year:
2002
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.206-213.523
File:
PDF, 272 KB
2002