An electrostatic fringing-field actuator (EFFA):...

Journal of Micromechanics and Microengineering 2007 / 07 Vol. 17; Iss. 7

An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology

Rottenberg, X, Brebels, S, Ekkels, P, Czarnecki, P, Nolmans, P, Mertens, R P, Nauwelaers, B, Puers, R, Wolf, I De, Raedt, W De, Tilmans, H A C
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/7/s19
Date:
July, 2007
File:
PDF, 1.17 MB
english, 2007
Conversion to is in progress
Conversion to is failed