Automated hot-spot fixing system applied to the metal...

Automated hot-spot fixing system applied to the metal layers of 65-nm logic devices

Kobayashi, Sachiko
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
6
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2785030
Date:
July, 2007
File:
PDF, 1.04 MB
english, 2007
Conversion to is in progress
Conversion to is failed