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Automated hot-spot fixing system applied to the metal layers of 65-nm logic devices
Kobayashi, SachikoVolume:
6
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2785030
Date:
July, 2007
File:
PDF, 1.04 MB
english, 2007