Effect of Hydrogen Dilution on Growth of Silicon...

Plasma Science and Technology 2007 / 10 Vol. 9; Iss. 5

Effect of Hydrogen Dilution on Growth of Silicon Nanocrystals Embedded in Silicon Nitride Thin Film by Plasma-Enhanced CVD

Wenge, Ding, Lanfang, Zhen, Jiangyong, Zhang, Yachao, Li, Wei, Yu, Guangsheng, Fu
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Volume:
9
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/9/5/18
Date:
October, 2007
File:
PDF, 171 KB
english, 2007
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