SPIE Proceedings [SPIE SPIE Microtechnologies - Prague,...

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SPIE Proceedings [SPIE SPIE Microtechnologies - Prague, Czech Republic (Monday 18 April 2011)] Smart Sensors, Actuators, and MEMS V - A MEMS-based thermal infrared emitter for an integrated NDIR spectrometer

Calaza, C., Salleras, M., Sabaté, N., Santander, J., Cané, C., Fonseca, L., Schmid, Ulrich, Sánchez-Rojas, José Luis, Leester-Schaedel, Monika
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Volume:
8066
Year:
2011
Language:
english
DOI:
10.1117/12.887099
File:
PDF, 832 KB
english, 2011
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