Interfacial Reaction Mechanisms in Al 2 O 3 /Ge Structure by Oxygen Radical Process
Kato, Kimihiko, Shibayama, Shigehisa, Sakashita, Mitsuo, Takeuchi, Wakana, Taoka, Noriyuki, Nakatsuka, Osamu, Zaima, ShigeakiVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.04CA08
Date:
April, 2013
File:
PDF, 1.17 MB
english, 2013