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SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2014 - Zvenigorod, Russian Federation (Monday 6 October 2014)] International Conference on Micro- and Nano-Electronics 2014 - Electrostatically actuated MEMS switch with resistive contact

Orlikovsky, Alexander A., Uvarov, Ilya V., Naumov, Victor V., Selyukov, Roman V.
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Volume:
9440
Year:
2014
Language:
english
DOI:
10.1117/12.2179558
File:
PDF, 489 KB
english, 2014
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