SPIE Proceedings [SPIE Optical Data Storage - Vancouver, Canada (Monday 5 March 1990)] Optical Data Storage - Evaluation of photolithographic processes for high-density optical disc mastering
Put, Paul L., Kraakman, P. A., Morton, Robert D., Pasman, Jan H., Carlin, Donald B., Kay, David B.Volume:
1316
Year:
1990
Language:
english
DOI:
10.1117/12.137559
File:
PDF, 427 KB
english, 1990