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Optimization of the Chemical Vapor Deposition Induced Focused Ion Beam
Choi, Hon Zong, Kang, E.G., Lee, Seok Woo, Hong, W.P.Volume:
291-292
Year:
2005
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.291-292.413
File:
PDF, 6.12 MB
english, 2005