International Comparison CCQM-K15: Emission level of CF...

Metrologia 2006 / 01 Vol. 43; Iss. 1A

International Comparison CCQM-K15: Emission level of CF 4 and SF 6

Kim, Jin Seog, Moon, Dong Min, Kato, Kenji, Konopelko, Leonid A, Kustikov, Yury A, Guenther, Franklin R, Rhodrick, George
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Volume:
43
Language:
english
Journal:
Metrologia
DOI:
10.1088/0026-1394/43/1A/08009
Date:
January, 2006
File:
PDF, 1.88 MB
english, 2006
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