Octahedral-Structured Gigantic Precipitates as the Origin of Gate-Oxide Defects in Metal-Oxide-Semiconductor Large-Scale-Integrated Circuits
Itsumi, Manabu, Akiya, Hideo, Ueki, Takemi, Tomita, Masato, Yamawaki, MasatakaVolume:
35
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.812
Date:
February, 1996
File:
PDF, 1.65 MB
1996