A Multiple Resonant Mode Film Bulk Acoustic Resonator Based on Silicon-on-Insulator Structures
Chen, Xiao, Yang, Yi, Cai, Hua-Lin, Zhou, Chang-Jian, Ren, Tian-Ling, Mohammad, Mohammad AliVolume:
31
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/31/12/124302
Date:
December, 2014
File:
PDF, 1.10 MB
english, 2014