Submicron scale image observation with a grazing incidence...

Japanese Journal of Applied Physics 2014 / 08 Vol. 53; Iss. 8

Submicron scale image observation with a grazing incidence reflection-type single-shot soft X-ray microscope

Baba, Motoyoshi, Nishikino, Masaharu, Hasegawa, Noboru, Tomita, Takuro, Minami, Yasuo, Takei, Ryota, Yamagiwa, Mitsuru, Kawachi, Tetsuya, Suemoto, Tohru
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.080302
Date:
August, 2014
File:
PDF, 266 KB
english, 2014
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