SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Soft X-Ray and EUV Imaging Systems II - Damage resistant and low-stress Si-based multilayer mirrors
Feigl, Torsten, Yulin, Sergey A., Kuhlmann, Thomas, Kaiser, Norbert, Tichenor, Daniel A., Folta, James A.Volume:
4506
Year:
2001
Language:
english
DOI:
10.1117/12.450958
File:
PDF, 821 KB
english, 2001