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SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2014 - Zvenigorod, Russian Federation (Monday 6 October 2014)] International Conference on Micro- and Nano-Electronics 2014 - Study of growth kinetics of amorphous carbon nanopillars formed by PECVD
Orlikovsky, Alexander A., Gromov, D., Borgardt, N., Grishina, Y., Dedkova, A., Kirilenko, E., Dubkov, S.Volume:
9440
Year:
2014
Language:
english
DOI:
10.1117/12.2179765
File:
PDF, 828 KB
english, 2014