SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2014 - Zvenigorod, Russian Federation (Monday 6 October 2014)] International Conference on Micro- and Nano-Electronics 2014 - Carbon and fluorine co-implantation for boron diffusion suppression in extremely ultra shallow junctions
Orlikovsky, Alexander A., Miakonkikh, Andrey V., Rogozhin, Aleksander E., Rudakov, Valeriy I., Rudenko, Konstantin V., Lukichev, Vladimir F.Volume:
9440
Year:
2014
Language:
english
DOI:
10.1117/12.2181006
File:
PDF, 312 KB
english, 2014