Analytical and experimental study on the second harmonic mode response of a bulk acoustic wave resonator
Pang, Wei, Zhang, Hao, Ruby, Richard C, Yu, Hongyu, Kim, Eun SokVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/11/115015
Date:
November, 2010
File:
PDF, 68 KB
english, 2010