SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] MOEMS and Miniaturized Systems IX - Rotating out-of-plane micromirror
Oak, Sahil, Schenk, Harald, Piyawattanametha, Wibool, Edmiston, Greg, Sivakumar, Ganapathy, Ramirez, Gabriel, Dallas, TimVolume:
7594
Year:
2010
Language:
english
DOI:
10.1117/12.842003
File:
PDF, 431 KB
english, 2010