Silicon-on-insulator out-of-plane electrostatic actuator...

Journal of Micro/Nanolithography MEMS and MOEMS 2012 / 07 Vol. 11; Iss. 3

Silicon-on-insulator out-of-plane electrostatic actuator with in situ capacitive position sensing

Wang, Jiankun
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Volume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.11.3.033006
Date:
July, 2012
File:
PDF, 3.65 MB
english, 2012
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