Laser Doping and Recrystallization for Amorphous Silicon...

Materials Science Forum 2005 Vol. 475-479

Laser Doping and Recrystallization for Amorphous Silicon Films by Plasma-Enhanced Chemical Vapor Deposition

Wuu, Dong Sing, Lien, Shui-Yang, Wang, Jui Hao, Mao, Hsin-Yuan, Hsieh, In-Cha, Wu, Bing-Rui, Yao, Pin-Chuan
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Volume:
475-479
Year:
2005
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.475-479.3791
File:
PDF, 345 KB
english, 2005
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