Reinforced silicon neural microelectrode array fabricated...

Journal of Micro/Nanolithography MEMS and MOEMS 2009 / 07 Vol. 8; Iss. 3

Reinforced silicon neural microelectrode array fabricated using a commercial MEMS process

Hajj-Hassan, Mohamad
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Volume:
8
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3184795
Date:
July, 2009
File:
PDF, 555 KB
english, 2009
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